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J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.16.1.010102

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JM3 Letters

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Chris A. Mack
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.16.1.010501

Lithography

Metrology

Microfabrication

Microelectromechanical Systems (MEMS)

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Li Jingmin; Li Xia; Liu Ziyang; Liang Chao; Liu Chong
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.16.1.015001
Topics: Laser marking
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Leonid S. Sinev; Vladimir T. Ryabov
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.16.1.015003
Topics: Glasses, Silicon

Micro-optoelectromechanical Systems (MOEMS)

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Hui Zuo; Farzad Hossein Nia; Siyuan He
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.16.1.015501
Topics:

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