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Chris Mack
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.16.2.020101

Open Access Open Access

Topics: Engineering

Lithography

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Robert L. Bristol; Marie E. Krysak
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.16.2.023505
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Yibo Lin; Xiaoqing Xu; Bei Yu; Ross Baldick; David Z. Pan
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.16.2.023507

Metrology

Microfabrication

Microelectromechanical Systems (MEMS)

Micro-optoelectromechanical Systems (MOEMS)

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