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Editorial

Special Section on the Interface of Holography and MEMS

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Marc P. Georges; Cédric Thizy
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.14.4.041306
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Tobias Haist; Wolfgang Osten
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.14.4.041311
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Jed Khoury; Jarrett Vella
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.14.4.041312

Lithography

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Lina Shen; Sikun Li; Xiangzhao Wang; Guanyong Yan
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.14.4.043504
Topics: Polarization, Lenses

Metrology

Microfabrication

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Pavlo V. Antonov; Marc R. Zuiddam; Joost W.M. Frenken
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.14.4.044506

Open Access Open Access

Microelectromechanical Systems (MEMS)

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Ankush Jain; Hitesh Kumar Sharma; Ram Gopal
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.14.4.045002

Micro-optoelectromechanical Systems (MOEMS)

Errata

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J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.14.4.049801

Open Access Open Access

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