Dr. Akshdeep Sharma Profile

Dr. Akshdeep Sharma

Scientist at Ctr for Materials for Electronics Technology

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Publications (3)

Proceedings Article | 7 March 2014 Paper

Residual stress control during the growth and release process in gold suspended microstructures

Akshdeep Sharma, Deepak Bansal, Amit Kumar, Dinesh Kumar, Kamaljit Rangra

Proceedings Volume 8973, 89730F (2014) https://doi.org/10.1117/12.2041433

KEYWORDS: Gold, Microelectromechanical systems, Plasma, Oxygen, Photoresist materials, Thin films, Electroplating, Plating, Power supplies, Wet etching

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SPIE Journal Paper | 5 February 2014

Comparative study of various release methods for gold surface micromachining

Akshdeep Sharma, Prachi Jhanwar, Deepak Bansal, Amit Kumar, Maninder Kaur, Shilpi Pandey, Prem Kumar, Dinesh Kumar, Kamaljit Rangra

JM3, Vol. 13, Issue 01, 013005, (February 2014) https://doi.org/10.1117/12.10.1117/1.JMM.13.1.013005

KEYWORDS: Plasma, Microelectromechanical systems, Gold, Switches, Surface micromachining, Etching, Semiconducting wafers, Oxygen, Photomicroscopy

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Proceedings Article | 15 October 2012 Paper

Design of vertical packaging technology for RF MEMS switch

Deepak Bansal, Akshdeep Sharma, Maninder Kaur, K. Rangra

Proceedings Volume 8549, 854911 (2012) https://doi.org/10.1117/12.924260

KEYWORDS: Packaging, Microelectromechanical systems, Switches, Semiconducting wafers, Silicon, Metals, Scanning electron microscopy, Neodymium, Dielectrics, Signal attenuation

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