Amir Reza Merati
at Amirkabir Univ of Technology
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 26 April 2013
Mohamad Amin Rezvankhah, Mohsen Shayan, Amir Reza Merati, Mohsen Pahlevani
JM3, Vol. 12, Issue 02, 023004, (April 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.2.023004
KEYWORDS: Chemical species, Etching, Silicon, Anisotropic etching, Photomasks, Simulation of CCA and DLA aggregates, Semiconducting wafers, Crystals, Tin, Device simulation

SPIE Journal Paper | 1 April 2011
Mohsen Shayan, Amir Reza Merati, Behrooz Arezoo, Mohamad Amin Rezvankhah
JM3, Vol. 10, Issue 02, 029701, (April 2011) https://doi.org/10.1117/12.10.1117/1.3586798
KEYWORDS: Chemical species, Etching, Anisotropic etching, Silicon, Wet etching, Crystals, Microelectromechanical systems, Monte Carlo methods, Computer simulations, Fabrication

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