Dr. Bin Xu Profile

Dr. Bin Xu

at Tohoku Univ

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Publications (2)

Proceedings Article | 22 June 2013 Paper

Surface form metrology of micro-optics

Bin Xu, Zhigang Jia, Xinghui Li, Yuan-Liu Chen, Yuki Shimizu, So Ito, Wei Gao

Proceedings Volume 8769, 876902 (2013) https://doi.org/10.1117/12.2019243

KEYWORDS: Micro optics, Optical scanning systems, Profiling, Lenses, Metrology, Microscopes, Computer programming, Atomic force microscopy, Diffraction, Diffraction gratings

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Proceedings Article | 16 November 2011 Paper

A glass tube micro-stylus probe for surface form metrology

Bin Xu, Yuki Shimizu, Wei Gao

Proceedings Volume 8321, 83211Z (2011) https://doi.org/10.1117/12.904875

KEYWORDS: Glasses, Sensors, Ferroelectric materials, Metrology, Actuators, Neodymium, Scanning tunneling microscopy, Tolerancing, Optical components, Atomic force microscopy

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