Ms. Guorong Zhao Profile

Guorong Zhao

at Institute of Electrical Engineering

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Publications (2)

Proceedings Article | 19 November 2007 Paper

Impact of molybdenum/silicon multilayer structure on extreme ultraviolet mask fabrication

Guorong Zhao, Yanqiu Li

Proceedings Volume 6724, 672411 (2007) https://doi.org/10.1117/12.782733

KEYWORDS: Scattering, Electron beam lithography, Extreme ultraviolet, Backscatter, Monte Carlo methods, Mask making, Molybdenum, Photomasks, Extreme ultraviolet lithography, Silicon

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Proceedings Article | 15 May 2007 Paper

A comparison study of tantalum-nitrogen and chromium absorber in extreme ultraviolet mask fabrication using electron-beam lithography simulation

Guorong Zhao, Yanqiu Li

Proceedings Volume 6607, 66073C (2007) https://doi.org/10.1117/12.729031

KEYWORDS: Scattering, Electron beam lithography, Chromium, Extreme ultraviolet, Photomasks, Extreme ultraviolet lithography, Electroluminescence, Backscatter, Mask making, Silicon

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