Dr. Hwan Kim
at SK Hynix Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 26 March 2019 Presentation
Harm Dillen, Dorothe Oorschot, Marleen Kooiman, Willem van Mierlo, Ziyang Wang, Kang-San Lee, Jin-Woo Lee, Ruochong Fei, Shu-Yu Lai, Marc Kea, Inhwan Lee, Hwan Kim, Junghyun Kang, Jaehee Hwang, Chang-Moon Lim
Proceedings Volume 10959, 109591K (2019) https://doi.org/10.1117/12.2515487
KEYWORDS: Failure analysis, Critical dimension metrology, Metrology, Extreme ultraviolet lithography, Printing, Semiconducting wafers

Proceedings Article | 2 May 2018 Presentation + Paper
Jo Finders, Ziyang Wang, John McNamara, Gijsbert Rispens, Pär Broman, Chang-Nam Ahn, Inhwan Lee, Hwan Kim, Junghyun Kang, Yoonsuk Hyun, Chang-Moon Lim
Proceedings Volume 10583, 105830Y (2018) https://doi.org/10.1117/12.2299598
KEYWORDS: Nanoimprint lithography, Lithographic illumination, Photomasks, Fiber optic illuminators, Diffraction, Extreme ultraviolet lithography, Reticles, Printing, Semiconducting wafers, Optical lithography

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