Dr. Inseok Park Profile

Dr. Inseok Park

at Samsung Electronics Co Ltd

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Publications (3)

Proceedings Article | 10 April 2024 Presentation + Paper

3D gray level index for pattern depth monitoring based on SEM Image

Hyeon Bo Shim, Jaehyung Ahn, Inseok Park, Souk Kim, Younghoon Sohn

Proceedings Volume 12955, 1295511 (2024) https://doi.org/10.1117/12.3010209

KEYWORDS: Scanning electron microscopy, 3D image processing, 3D metrology, Design rules, Critical dimension metrology, Monte Carlo methods, Metrology, Manufacturing

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Proceedings Article | 27 April 2023 Poster + Paper

Local depth monitoring using scanning electron microscopy and its verification using atomic force microscopy

Inseok Park, JaeHyung Ahn, Donghyun Lee, Souk Kim, Minho Rim, Younghoon Sohn

Proceedings Volume 12496, 124962L (2023) https://doi.org/10.1117/12.2657848

KEYWORDS: Scanning electron microscopy, Atomic force microscopy, Transmission electron microscopy, Semiconducting wafers, Reliability, Metrology, Signal detection, Semiconductors, Optical transmission, Optical sensing

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Proceedings Article | 27 April 2023 Poster + Paper

3D measurement using SEM technology

Younghoon Sohn, JaeHyung Ahn, Inseok Park, Souk Kim, DongHoon Kim

Proceedings Volume 12496, 124963M (2023) https://doi.org/10.1117/12.2657478

KEYWORDS: Single crystal X-ray diffraction, Scanning electron microscopy, Critical dimension metrology, 3D metrology, Electron beams, Semiconducting wafers, Etching, Cadmium, Optical testing, Optical limiting

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