Jiao Zhang
at Shanghai Huali Microelectronics Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11328, 1132817 (2020) https://doi.org/10.1117/12.2551681
KEYWORDS: Chemical mechanical planarization, Manufacturing, Optimization (mathematics), Copper, Design for manufacturing, Lithography, Modeling and simulation, Product engineering, Semiconducting wafers, Model-based design

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