Karen Stiers
at imec
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 9 April 2024 Presentation + Paper
Proceedings Volume 12958, 129580B (2024) https://doi.org/10.1117/12.3014213
KEYWORDS: Etching, Optical lithography, Polymers, Semiconducting wafers, Plasma etching, Passivation, Lithography, Plasma, Dry etching, Wafer testing

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top