Matthew Sagianis
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 25 May 2022 Presentation + Paper
L. Buzi, D. Koty, M. Hopstaken, J. Bruley, L. Gignac, M. Sagianis, D. Farmer, H. Miyazoe, A. Mosden, S. Engelmann, R. Bruce
Proceedings Volume 12056, 1205609 (2022) https://doi.org/10.1117/12.2614303
KEYWORDS: Plasma, Etching, Plasma enhanced chemical vapor deposition, Oxygen, Argon, Refractive index, Hydrogen, FT-IR spectroscopy, Wet etching

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11615, 116150J (2021) https://doi.org/10.1117/12.2583645
KEYWORDS: Analytics, Data processing, Sensors, Semiconducting wafers, Process control, Manufacturing, Time metrology, Statistical analysis, Semiconductor manufacturing, Metrology

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