Dr. Muralidhar K. Ghantasala Profile

Dr. Muralidhar K. Ghantasala

Professor at Western Michigan Univ

SPIE Involvement:

Author

Publications (28)

Proceedings Article | 31 March 2010 Paper

Simulation of the effect of different parameters on the swelling characteristics of a pH-sensitive hydrogel

Kamlesh Suthar, Derrick Mancini, Muralidhar Ghantasala

Proceedings Volume 7644, 764418 (2010) https://doi.org/10.1117/12.849138

KEYWORDS: Ions, Polymers, Diffusion, Hydrogen, Finite element methods, Microelectromechanical systems, Mechanics, Biological and chemical sensing, Computer simulations, Chemical elements

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Proceedings Article | 1 April 2009 Paper

Characterization of ferrogels prepared using {gamma}-Fe2O3 and Fe3O4 nanoparticles

Kamlesh Suthar, Muralidhar Ghantasala, Derrick Mancini, Jan Ilavsky

Proceedings Volume 7289, 72891D (2009) https://doi.org/10.1117/12.817807

KEYWORDS: Particles, Nanoparticles, Magnetism, Transmission electron microscopy, Adaptive optics, Bismuth, Scattering, Capillaries, X-rays, Photomicroscopy

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Proceedings Article | 21 December 2007 Paper

Simulation of hydrogel micro-actuation

Kamlesh Suthar, M. Ghantasala, D. Mancini

Proceedings Volume 6798, 67980P (2007) https://doi.org/10.1117/12.769925

KEYWORDS: Ions, Finite element methods, Sodium, Chlorine, Actuators, Chemical elements, Systems modeling, Temperature metrology, Diffusion, Focus stacking software

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SPIE Journal Paper | 1 July 2007

Study of stress and adhesion strength in SU-8 resist layers on silicon substrate with different seed layers

Richard Barber, Muralidhar Ghantasala, Ralu Divan, Derrick Mancini, Erol Harvey

JM3, Vol. 6, Issue 03, 033006, (July 2007) https://doi.org/10.1117/12.10.1117/1.2778644

KEYWORDS: Silicon, Titanium, Gold, Metals, Copper, Chromium, Polymethylmethacrylate, Semiconducting wafers, X-ray lithography, Chemical analysis

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Proceedings Article | 23 February 2005 Paper

Fabrication of microstructures with different aspect ratios in a single layer

Yao Fu, Erol Harvey, Muralidhar Ghantasala

Proceedings Volume 5650, (2005) https://doi.org/10.1117/12.581894

KEYWORDS: Copper, Magnetism, Electroplating, Photoresist materials, Silicon, Electromagnetism, Semiconducting wafers, Resistance, Photomasks, Confocal microscopy

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Proceedings Article | 2 April 2004 Paper

An investigation of SU-8 resist adhesion in deep x-ray lithography of high-aspect-ratio structures

Richard Barber, Muralidhar Ghantasala, Ralu Divan, Derrick Mancini, Erol Harvey

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.521170

KEYWORDS: Silicon, Radium, Lithography, X-ray lithography, Ultraviolet radiation, Polymethylmethacrylate, X-rays, Semiconducting wafers, Photoresist processing, Gold

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Proceedings Article | 2 April 2004 Paper

Design, modeling, and fabrication of piezoelectric polymer actuators

Yao Fu, Erol Harvey, Muralidhar Ghantasala, Geoff Spinks

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.527885

KEYWORDS: Ferroelectric polymers, Polymers, Nickel, Composites, Actuators, Electroplating, Polymeric actuators, Optical simulations, Micromachining, Microelectromechanical systems

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Proceedings Article | 2 April 2004 Paper

Patterning of SU-8 resist structures using CF4

Kaushal Vora, Anthony Holland, Muralidhar Ghantasala, Arnan Mitchell

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.523903

KEYWORDS: Etching, Surface roughness, Plasma etching, Plasma, Photoresist materials, Metals, Optical lithography, Photomasks, Ions, Photonics

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Proceedings Article | 2 April 2004 Paper

Selective wet-etching of filtered arc deposited TiN films on Cr sacrificial layers

Andrew Dowling, Muralidhar Ghantasala, E. Doyle, Erol Harvey

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.524048

KEYWORDS: Chromium, Tin, Etching, Silicon, Scanning electron microscopy, Optical lithography, Microelectromechanical systems, Photomasks, Bridges, Sensors

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Proceedings Article | 29 March 2004 Paper

Fabrication, measurement, and modeling of electro-osmotic flow in micromachined polymer microchannels

Nihal Suriyage, Muralidhar Ghantasala, Pio Iovenitti, Erol Harvey

Proceedings Volume 5275, (2004) https://doi.org/10.1117/12.521576

KEYWORDS: Microfluidics, Polymers, Excimer lasers, Positron emission tomography, Glasses, Laser ablation, Liquids, Finite element methods, Solids, Visualization

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Proceedings Article | 14 October 2003 Paper

Fabrication of 3D high-aspect-ratio microfluidic components using laser machining and LIGA

Muralidhar Ghantasala, Richard Barber, Nicolai Moldovan, Derrick Mancini, Erol Harvey

Proceedings Volume 5062, (2003) https://doi.org/10.1117/12.514474

KEYWORDS: Excimer lasers, Polymethylmethacrylate, Microfluidics, Micromachining, Photomasks, Photoresist materials, Silicon, Polymers, Lithography, Ultraviolet radiation

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Proceedings Article | 14 November 2002 Paper

Laser-LIGA for Ni microcantilevers

Hengyi Jin, Erol Harvey, Jason Hayes, Muralidhar Ghantasala, Yao Fu, Karlo Jolic, Matthew Solomon, Kynan Graves

Proceedings Volume 4935, (2002) https://doi.org/10.1117/12.476113

KEYWORDS: Nickel, Excimer lasers, Copper, Polymers, Etching, Micromachining, Actuators, Temperature metrology, Laser processing, Microactuators

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Proceedings Article | 13 November 2002 Paper

Single-shot selective laser micromachining of filtered-arc-deposited TiN films from chromium underlayer

Andrew Dowling, Muralidhar Ghantasala, Peter Evans, Jason Hayes, Erol Harvey, E. Derry Doyle

Proceedings Volume 4934, (2002) https://doi.org/10.1117/12.469051

KEYWORDS: Tin, Chromium, Optical filters, Optical lithography, Micromachining, Silicon, Scanning electron microscopy, Confocal microscopy, Excimer lasers, Laser ablation

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Proceedings Article | 13 November 2002 Paper

Effect of argon gas pressure and substrate temperature on magnetic properties of magnetron-sputtered SmCo thin films

Yun Wang, Dinesh Sood, Muralihar Ghantasala

Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.476346

KEYWORDS: Argon, Thin films, Oxygen, Magnetism, Thin film deposition, Samarium, Sputter deposition, Chemical species, Thin film devices, Crystals

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Proceedings Article | 13 November 2002 Paper

Patterning of magnetron sputtered SmCo films by excimer laser ablation

Yun Wang, Muralihar Ghantasala, Dinesh Sood, Erol Harvey

Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.476351

KEYWORDS: Thin films, Laser ablation, Excimer lasers, Chromium, Silicon, Scanning electron microscopy, Optical lithography, Micromachining, Silicon films, Microelectromechanical systems

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Proceedings Article | 21 November 2001 Paper

Laser-LIGA for Serpentine Ni Microstructure

Hengyi Jin, Erol Harvey, Jason Hayes, Muralihar Ghantasala, Andrew Dowling, Matthew Solomon, Sam Davies

Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.448962

KEYWORDS: Nickel, Excimer lasers, Copper, Laser ablation, Polymers, Photoresist materials, Optical lithography, Confocal microscopy, Silicon, Etching

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Proceedings Article | 21 November 2001 Paper

Influence of patterning geometry on the electrodeposition of microstructures fabricated by laser LIGA

Hengyi Jin, Sam Davies, Muralihar Ghantasala, Jason Hayes, Erol Harvey

Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.449006

KEYWORDS: Nickel, Electroplating, Optical lithography, Plating, Laser ablation, Polymers, Copper, Excimer lasers, Laser scanners, Confocal microscopy

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Proceedings Article | 21 November 2001 Paper

Excimer laser patterning of TiN film from metal sacrificial layers

Andrew Dowling, Muralihar Ghantasala, Jason Hayes, Erol Harvey, Derry Doyle

Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.449005

KEYWORDS: Tin, Chromium, Silicon, Copper, Optical lithography, Excimer lasers, Laser ablation, Metals, Confocal microscopy, Photomicroscopy

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Proceedings Article | 21 November 2001 Paper

Micromachining of TiNi shape memory alloy by excimer laser ablation

Sam Davies, Erol Harvey, Hengyi Jin, Jason Hayes, Muralihar Ghantasala

Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.449012

KEYWORDS: Laser ablation, Excimer lasers, Micromachining, Shape memory alloys, Metals, Thin films, Pulsed laser operation, Polymers, Laser damage threshold, Optical lithography

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Proceedings Article | 19 November 2001 Paper

Investigation of MoO3-WO3 thin film microstructure for gas sensing applications

Kosmas Galatsis, Muralihar Ghantasala, Yongxiang Li, Kourosh Kalantar-Zadeh, Adrian Trinchi, Wojtek Wlodarski, A. Taurino, Pietro Siciliano, Lara Cukrov

Proceedings Volume 4590, (2001) https://doi.org/10.1117/12.454610

KEYWORDS: Molybdenum, Oxides, Silicon, Carbon monoxide, Metals, Transmission electron microscopy, Crystals, Diffraction, Thin films, Gas sensors

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Proceedings Article | 16 March 2001 Paper

Laser micromachining and nickel plating of high-aspect-ratio structures in polymer molds

Hengyi Jin, Muralihar Ghantasala, Jason Hayes, Karlo Jolic, Erol Harvey

Proceedings Volume 4236, (2001) https://doi.org/10.1117/12.418760

KEYWORDS: Micromachining, Nickel, Plating, Polymers, Silicon films, Copper, Scanning electron microscopy, Photoresist materials, Polymer thin films, Silicon

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Proceedings Article | 16 March 2001 Paper

Laser ablation and lift-off technique for fabricating simple microfluidic devices

Jason Hayes, Erol Harvey, Muralihar Ghantasala, Brian Dempster

Proceedings Volume 4236, (2001) https://doi.org/10.1117/12.418749

KEYWORDS: Laser ablation, Microfluidics, Polymers, Excimer lasers, Electrodes, Adhesives, Etching, Laser liftoff, Copper, Gold

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Proceedings Article | 21 June 2000 Paper

Microengineering of magnetic bearings and actuators

Muralihar Ghantasala, LiJiang Qin, Dinesh Sood, Ronald Zmood

Proceedings Volume 3990, (2000) https://doi.org/10.1117/12.388907

KEYWORDS: Magnetism, Actuators, Sensors, Electromagnetism, Control systems, Microelectromechanical systems, Shape memory alloys, Reliability, Copper, Amplifiers

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Proceedings Article | 1 October 1999 Paper

Oxygen gas sensing and microstructure characterization of sol-gel-prepared MoO3-TiO2 thin films

Yongxiang Li, Muralihar Ghantasala, Kosmas Galatsis, Wojtek Wlodarski

Proceedings Volume 3892, (1999) https://doi.org/10.1117/12.364505

KEYWORDS: Thin films, Oxides, Titanium, Oxygen, Sensors, Silicon, Chemical analysis, Ozone, Molybdenum, Silicon films

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Proceedings Article | 29 September 1999 Paper

Micromagnetic bearing for friction minimization in micromachines

Muralihar Ghantasala, Dinesh Sood, Ronald Zmood

Proceedings Volume 3891, (1999) https://doi.org/10.1117/12.364440

KEYWORDS: Magnetism, Plating, Photoresist materials, Control systems, Copper, Position sensors, Semiconducting wafers, Actuators, Electroplating, Control systems design

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Proceedings Article | 30 August 1999 Paper

Excimer laser micromachining of structures using SU-8

Muralihar Ghantasala, Erol Harvey, Dinesh Sood

Proceedings Volume 3874, (1999) https://doi.org/10.1117/12.361208

KEYWORDS: Etching, Laser ablation, Photoresist materials, Excimer lasers, Micromachining, Photomasks, Silicon, Pulsed laser operation, Scanning electron microscopy, Optical lithography

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Proceedings Article | 14 November 1997 Paper

Characterization of sol-gel-prepared Ti02 thin film for O2 sensing

Massood Atashbar, Muralihar Ghantasala, Wojtek Wlodarski

Proceedings Volume 3241, (1997) https://doi.org/10.1117/12.293527

KEYWORDS: Thin films, Oxygen, Scanning electron microscopy, Niobium, Annealing, Doping, Crystals, Sol-gels, Platinum, Oxides

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Proceedings Article | 14 November 1997 Paper

Novel method for electroplating on silicon without the need of a continuous-plating base film

Muralihar Ghantasala, Dinesh Sood

Proceedings Volume 3242, (1997) https://doi.org/10.1117/12.293558

KEYWORDS: Silicon, Plating, Semiconducting wafers, Silicon films, Electroplating, Ions, Photoresist materials, Ion implantation, Resistance, Palladium

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Showing 5 of 28 publications

Conference Committee Involvement (2)

Device and Process Technologies for Microelectronics, MEMS, and Photonics

10 December 2003 | Perth, Australia

Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS

10 December 1997 | Adelaide, Australia

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