CONFERENCE PROCEEDINGS
Advanced Search
Natsuki Tsuno
at Hitachi Ltd
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 10 April 2024 Poster
Electrical characterization and inspection of contact plugs using laser-assisted SEM
Minami Shoji, Yohei Nakamura, Yasuhiro Shirasaki, Heita Kimizuka, Kazufumi Yachi, Satoshi Takada, Natsuki Tsuno
Proceedings Volume 12955, 129553G (2024) https://doi.org/10.1117/12.3011058
KEYWORDS: Inspection, Scanning electron microscopy, Metrology, Laser irradiation, Electrical properties, Defect detection, Yield improvement, Semiconductors, Modulation, Manufacturing
Proceedings Article | 10 April 2024 Presentation + Paper
Evaluation of thin-film material properties using laser-assisted SEM
Yasuhiro Shirasaki, Minami Shoji, Yohei Nakamura, Kazufumi Yachi, Satoshi Takada, Natsuki Tsuno
Proceedings Volume 12955, 129551K (2024) https://doi.org/10.1117/12.3009789
KEYWORDS: Scanning electron microscopy, Materials properties, Laser irradiation, Electron beams, Plasma etching, Semiconductors, Etching, Annealing, Interfaces, Plasma
Proceedings Article | 27 April 2023 Presentation + Paper
Laser-assisted SEM for high-spatial resolution material metrology and inspection
Yasuhiro Shirasaki, Minami Shoji, Yohei Nakamura, Shota Mitsugi, Heita Kimizuka, Satoshi Takada, Yuko Iwabuchi, Natsuki Tsuno
Proceedings Volume 12496, 124961T (2023) https://doi.org/10.1117/12.2658184
KEYWORDS: Scanning electron microscopy, Laser irradiation, Electron beams, Materials properties, Semiconductors, Metrology, Inspection
Proceedings Article | 27 April 2023 Poster + Paper
Laser assisted SEM for visualizing electrical property using voltage contrast dynamics
Minami Shoji, Yohei Nakamura, Yasuhiro Shirasaki, Shota Mitsugi, Heita Kimizuka, Satoshi Takada, Yuko Iwabuchi, Natsuki Tsuno
Proceedings Volume 12496, 1249630 (2023) https://doi.org/10.1117/12.2658182
KEYWORDS: Scanning electron microscopy, Resistance, Laser irradiation, Electrical properties, Modulation, Manufacturing, Inspection, Metals, Laser development, Electron beams
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top