The scattering of defects on the surface of the mirror directly affects the performance and accuracy of the optical testing system. The scattering of the surface defect of the mirror can be detected by the laser scattering microscope. In order to ensure the detection efficiency and precision of the whole system, the microlens lens, the size of the spot and the power spectrum response of CCD are designed in the design of the hardware system. secondly, the laser scattering microscopic imaging test system is programmed on the software system, which can use the stepping motor to scan the surface of the mirror, and control the image acquisition card to capture the image and display it visually; To obtain the scattering image of defects, it is necessary to study the laser scattering laws of various types of defects, and to select a reasonable microscopic imaging Scattering theory for a specific type of defects. focusing on the effects of different incident angles of light sources and scattered light at different angles of the same incident angle on the imaging quality of defects, and the relationship between laser irradiation and smear scattered light imaging in the spatial domain is obtained. A high-quality plaque scattering image lays a solid foundation.
A theoretical model for the backscattering from thin film deposited on super-smooth optical surface is established, based on which, a solid-angle integrated scattering (SIS) characterization system is built. The SIS measurement collects backscattered light in a limited solid angle by using an integrating sphere. The characterization system consists of three major parts: mechanical system, photoelectric conversion system, and control software. The scattered flux is spatially integrated by the integrating sphere and is detected by a photomultiplier and lock-in amplifier. The lock-in detection offers excellent noise rejection and is the key to the sensitivity. The measurement can be performed completely under the control software based on the Labview. Experiment results of the measurement are presented, sources of error are analyzed. Results showed that the backscattering down to 10ppm could be characterized with a resolution of 1ppm. The system can be used to measure the backscattering for an incident angle between 25o and 50o.
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