Prof. Yang Qi Profile

Prof. Yang Qi

at Northeastern Univ

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Publications (1)

SPIE Journal Paper | 1 January 2009

Fabrication of continuous V-grooves with Si(110) sidewalls using TiO₂ resist mask by anisotropic wet etching

Xiaoming Yu, Bingsen Zhang, Jing Guo, Huazhe Yang, Ying Zhang, Shimin Shen, Yang Qi

JM3, Vol. 8, Issue 01, 013012, (January 2009) https://doi.org/10.1117/12.10.1117/1.3074832

KEYWORDS: Silicon, Etching, Photomasks, Wet etching, Scanning electron microscopy, Silicon films, Confocal microscopy, Isotropic etching, Photomicroscopy, Titanium dioxide

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