CONFERENCE PROCEEDINGS
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Dr. Yoh Yamamoto
at Hitachi High-Tech Science Corp
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Author
Publications (4)
Proceedings Article | 28 June 2005 Paper
Preliminary study on EPL mask repair technology for 45-nm node
Nobuyuki Iriki, Hiroshi Arimoto, Yo Yamamoto, Akira Tamura
Proceedings Volume 5853, (2005) https://doi.org/10.1117/12.617280
KEYWORDS: Photomasks, Etching, Photomicroscopy, Semiconducting wafers, Inspection, Defect inspection, Image transmission, Printing, Raster graphics, Ion beams
Proceedings Article | 20 August 2004 Paper
FIB mask repair technology for electron projection lithography
Yoh Yamamoto, Masakatsu Hasuda, Hiroyuki Suzuki, Makoto Sato, Osamu Takaoka, Hiroshi Matsumura, Noboru Matsumoto, Kouji Iwasaki, Ryoji Hagiwara, Katsumi Suzuki, Yutaka Ikku, Kazuo Aita, Takashi Kaito, Tatsuya Adachi, Anto Yasaka, Jiro Yamamoto, Teruo Iwasaki, Masaki Yamabe
Proceedings Volume 5446, (2004) https://doi.org/10.1117/12.557731
KEYWORDS: Photomasks, Imaging systems, Opacity, Electron beam lithography, Projection lithography, Etching, Ion beams, Sensors, Image processing, Silicon
Proceedings Article | 22 September 1999 Paper
Photochemical vapor deposition by optical near field
Proceedings Volume 3791, (1999) https://doi.org/10.1117/12.363849
KEYWORDS: Near field optics, Zinc, Nanolithography, Optical fibers, Fabrication, Nanophotonics, Near field, Ultraviolet radiation, Metals, Control systems
Proceedings Article | 22 September 1999 Paper
Fabrication of ZnO nanostructure using near-field optical technology
Proceedings Volume 3791, (1999) https://doi.org/10.1117/12.363850
KEYWORDS: Zinc oxide, Near field optics, Nanolithography, Nanostructures, Ultraviolet radiation, Near field, Light sources, Crystals, Transmittance, Optical fibers
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