Mr. Zhigang Mao Profile

Zhigang Mao

Process Engineer at Applied Materials Inc

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Author

Publications (2)

Proceedings Article | 11 May 2009 Paper

Zhigang Mao, Tiecheng Zhou, Michael Grimbergen, Darin Bivens, David Knick, Renee Koch, Madhavi Chandrachood, Jeff Chen, Ibrahim Ibrahim, Ajay Kumar

Proceedings Volume 7379, 73791U (2009) https://doi.org/10.1117/12.824306

KEYWORDS: Plasma, Etching, Oxygen, Chromium, Chlorine, Atmospheric plasma, Spectroscopy, Photomasks, Phase modulation, Contamination

Proceedings Article | 19 May 2008 Paper

Zhigang Mao, Xiaoyi Chen, David Knick, Michael Grimbergen, Madhavi Chandrahood, Ibrahim Ibrahim, Ajay Kumar

Proceedings Volume 7028, 702823 (2008) https://doi.org/10.1117/12.793080

KEYWORDS: Etching, Chromium, Chemistry, Plasma, Quartz, Photomasks, Photoresist materials, Particles, Critical dimension metrology, Plasma etching

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