High Tc Superconducting Thin Films And Devices Made From YBa2Cu3Oy

Robert B. Laibowitz; Roger H. Koch

doi:10.1117/12.947463

23 August 1988 High Tc Superconducting Thin Films And Devices Made From YBa₂Cu₃O_y

Robert B. Laibowitz, Roger H. Koch

Proceedings Volume 0948, High-Tc Superconductivity: Thin Films and Devices; (1988) https://doi.org/10.1117/12.947463
Event: Advances in Semiconductors and Superconductors: Physics and Device Applications, 1988, Newport Beach, CA, United States

Abstract

We have used both electron-beam vapor deposition and sputtering systems to deposit superconducting thin films of the compound YBa₂C_u30_y. In the e-beam deposition system the three metals are individually evaporated in an oxygen partial pressure while the sputtering system uses composite targets. After a high temperature furnace anneal in flowing oxygen these films can have transition temperatures as high as 91 K. The films in thicknesses ranging from 0.07 to several microns are deposited on a variety of substrates such as alumina, Si, MgO, zirconia and SrTiO3. The epitaxial films which are grown on polished SrTiO₃ single crystals generally show the highest critical current density, around 101A/cm² observed at 4 K. Device applications of these films such as SQUIDs and transmission lines will be discussed with particular reference to the processing and patterning techniques used in their fabrication. These techniques include photo-and e-beam lithography, ion implantation and milling and laser ablation.

Citation Download Citation

Robert B. Laibowitz and Roger H. Koch "High Tc Superconducting Thin Films And Devices Made From YBa₂Cu₃O_y", Proc. SPIE 0948, High-Tc Superconductivity: Thin Films and Devices, (23 August 1988); https://doi.org/10.1117/12.947463

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available