Hotspot fixing methodologies are increasingly deployed during tapeouts as a means to optimize the tradeoffs between complex, highly accurate correction methods and faster methods that are sufficient for most pattern areas.1 However, pattern database hierarchies may not be optimum for these hotspot fixing flows, as they are optimized for the initial correction run or method. This paper examines the usage of pattern matching to regain hierarchy and significantly reduce turn-around-time for complex hotspot fixing methods. Gains in turn-around-time can be well over 50 times faster than reusing the original correction’s hierarchy. |
ACCESS THE FULL ARTICLE
No SPIE Account? Create one
Optical proximity correction
Databases
3D modeling
Lithography
Computer programming
Photomasks
Current controlled current source