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16 December 2022 Low thermal mass long wave infrared metasurface absorber for small pixel microbolometer with fast response
Jing Yang, Jianjun Lai, Jianfei Gao
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Proceedings Volume 12324, Infrared, Millimeter-Wave, and Terahertz Technologies IX; 123240W (2022) https://doi.org/10.1117/12.2642732
Event: SPIE/COS Photonics Asia, 2022, Online Only
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Abstract
We demonstrate a low thermal mass long wave infrared broadband metasurface absorber employed for a double-layer umbrella 8μm small pixel pitch microbolometer, which is achieved by depositing an array of metal patches on the thin dielectric slab and forming an optical resonator with a metal back-reflector. The absorber achieves near-unity optical absorptivity within the long wave infrared regime (8-14μm) due to its optical impedance exhibits a good matching characteristic with the free space impedance of 377Ω, while reducing significantly the thermal mass and obtaining the time constant of 10.96 ms. Consequently, the thermal response speed of the microbolometer is increased by nearly 50% compared with the multilayer absorbing film. Furthermore, maximum thermal mass reduction of the device is performed, finding the optimal perforated diameter 0.75μm with the thickness of SiNx film 65nm, which reduces the absorbing area by 28.8%, lower the time constant to 9.7ms and further improve the response speed of the detector, while maintaining the average LWIR absorption as high as 96%.
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Jing Yang, Jianjun Lai, and Jianfei Gao "Low thermal mass long wave infrared metasurface absorber for small pixel microbolometer with fast response", Proc. SPIE 12324, Infrared, Millimeter-Wave, and Terahertz Technologies IX, 123240W (16 December 2022); https://doi.org/10.1117/12.2642732
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KEYWORDS
Microbolometers
Long wavelength infrared
Absorption
Infrared radiation
Sensors
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