Ms. Jing Yang Profile

Jing Yang

at HuaZhong Univ of Science and Technology

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Proceedings Article | 16 December 2022 Poster + Presentation + Paper

Low thermal mass long wave infrared metasurface absorber for small pixel microbolometer with fast response

Jing Yang, Jianjun Lai, Jianfei Gao

Proceedings Volume 12324, 123240W (2022) https://doi.org/10.1117/12.2642732

KEYWORDS: Microbolometers, Long wavelength infrared, Absorption, Infrared radiation, Sensors

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We demonstrate a low thermal mass long wave infrared broadband metasurface absorber employed for a double-layer umbrella 8μm small pixel pitch microbolometer, which is achieved by depositing an array of metal patches on the thin dielectric slab and forming an optical resonator with a metal back-reflector. The absorber achieves near-unity optical absorptivity within the long wave infrared regime (8-14μm) due to its optical impedance exhibits a good matching characteristic with the free space impedance of 377Ω, while reducing significantly the thermal mass and obtaining the time constant of 10.96 ms. Consequently, the thermal response speed of the microbolometer is increased by nearly 50% compared with the multilayer absorbing film. Furthermore, maximum thermal mass reduction of the device is performed, finding the optimal perforated diameter 0.75μm with the thickness of SiNx film 65nm, which reduces the absorbing area by 28.8%, lower the time constant to 9.7ms and further improve the response speed of the detector, while maintaining the average LWIR absorption as high as 96%.

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