Scattering cross sections of tin ions with molecular hydrogen

Nathan Bartlett; Andrew Herschberg; Jameson Crouse; Raquel Garza; Raj Ganeson; Tamar A. Dallal; Jake Nuttall; Linus Ringstad; David N. Ruzic

doi:10.1117/12.2658352

28 April 2023 Scattering cross sections of tin ions with molecular hydrogen

Nathan Bartlett, Andrew Herschberg, Jameson Crouse, Raquel Garza, Raj Ganeson, Tamar A. Dallal, Jake Nuttall, Linus Ringstad, David N. Ruzic

Author Affiliations +

Proceedings Volume 12494, Optical and EUV Nanolithography XXXVI; 124941F (2023) https://doi.org/10.1117/12.2658352
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Conference Poster

Abstract

The laser produced plasma of Extreme Ultraviolet (EUV) sources create energetic tin ions. Hydrogen buffer gas is used to slow down the ions through scattering. The scattering cross sections are not well known and are key to modeling the device. Beam attenuation experiments of tin ions in molecular hydrogen gas are underway in order to determine its effective cross section and intermolecular potential. This can be used to model tin ion transport inside of EUV source tools. Measurements are still underway and the exact values of the interatomic potential will be the topic of future publications. Once the potential is well characterized, it will be added to the open-source binary-collision-approximation code RustBCA.

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Nathan Bartlett, Andrew Herschberg, Jameson Crouse, Raquel Garza, Raj Ganeson, Tamar A. Dallal, Jake Nuttall, Linus Ringstad, and David N. Ruzic "Scattering cross sections of tin ions with molecular hydrogen", Proc. SPIE 12494, Optical and EUV Nanolithography XXXVI, 124941F (28 April 2023); https://doi.org/10.1117/12.2658352

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