Micro-mirror select and angle set algorithm of freeform pupil illumination systems in immersion scanners

Zhenxin Huang; Zenghui Yang; Linglin Zhu; Aijun Zeng; Huijie Huang

doi:10.1117/12.3008130

18 December 2023 Micro-mirror select and angle set algorithm of freeform pupil illumination systems in immersion scanners

Zhenxin Huang, Zenghui Yang, Linglin Zhu, Aijun Zeng, Huijie Huang

Author Affiliations +

Proceedings Volume 12959, AOPC 2023: Laser Technology and Applications; and Optoelectronic Devices and Integration; 129591B (2023) https://doi.org/10.1117/12.3008130
Event: Applied Optics and Photonics China 2023 (AOPC2023), 2023, Beijing, China

Abstract

With the improvement of the lithography resolution, the immersion scanners have a higher demand for the performance of the illumination pupil such as energy balance and polarization performance. The method of pupil generation by the immersion scanners are mainly by adjusting the angle distribution of micromirror array (MMA). Below the 40nm technology node, the influence of the polarization characteristics of the light on the imaging of the light must be considered. A micro-mirror select and angle set algorithm of freeform pupil illumination systems in immersion scanners is proposed that can guarantee the key characteristics of the freeform pupil, ensuring the energy balance of the pupil in the unpolarized state and the energy balance in the polarized state. The energy balance in the unpolarized state is related to the eccentricity of the light, and the energy balance in the polarized state and eccentricity of the light. In order to verify the accuracy of the algorithm, based on the unpolarization state of freeform pupil illumination optical simulation model and the polarization state of freeform pupil illumination optical simulation model, through the simulation found that the unpolarization state of energy balance and polarization energy balance greatly improved, reduced to 0.08%.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Zhenxin Huang, Zenghui Yang, Linglin Zhu, Aijun Zeng, and Huijie Huang "Micro-mirror select and angle set algorithm of freeform pupil illumination systems in immersion scanners", Proc. SPIE 12959, AOPC 2023: Laser Technology and Applications; and Optoelectronic Devices and Integration, 129591B (18 December 2023); https://doi.org/10.1117/12.3008130

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