Dr. Zenghui Yang
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 18 December 2023 Paper
Zhenxin Huang, Zenghui Yang, Linglin Zhu, Aijun Zeng, Huijie Huang
Proceedings Volume 12959, 129591B (2023) https://doi.org/10.1117/12.3008130
KEYWORDS: Polarization, Micromirrors, Scanners, Lithography, Optical simulations

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