Paper
5 October 1998 Adhesion force modeling and measurement for micromanipulation
Yu Zhou, Bradley J. Nelson
Author Affiliations +
Proceedings Volume 3519, Microrobotics and Micromanipulation; (1998) https://doi.org/10.1117/12.325737
Event: Photonics East (ISAM, VVDC, IEMB), 1998, Boston, MA, United States
Abstract
It is well known that surface effect forces such as van der Waals, electrostatic, and surface tension forces dominate part interactions as part dimensions fall below approximately 100 microns. Many researchers have suggested manipulation strategies that either diminish the effect of these forces or use these forces to advantage. There is little work, however, that comprehensively analyzes, both theoretically and experimentally, the exact contributions of such phenomena as surface roughness, material properties, environmental conditions, etc. to part interactions at microscales. This paper describes our work in developing a high resolution force sensor using optical beam deflection techniques for characterizing object interactions at the microscale. The interactions among a variety of micropart shapes and materials of varying surface roughness and conductivity were analyzed under various environmental conditions. Experimental results of this analysis are presented.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yu Zhou and Bradley J. Nelson "Adhesion force modeling and measurement for micromanipulation", Proc. SPIE 3519, Microrobotics and Micromanipulation, (5 October 1998); https://doi.org/10.1117/12.325737
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KEYWORDS
Optical spheres

Adhesives

Humidity

Surface roughness

Gold

Sensing systems

Silicon

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