Paper
18 August 1999 Force-controlled microgripping
Yu Zhou, Bradley J. Nelson
Author Affiliations +
Proceedings Volume 3834, Microrobotics and Microassembly; (1999) https://doi.org/10.1117/12.357826
Event: Photonics East '99, 1999, Boston, MA, United States
Abstract
When grasping microparts extremely low gripping low forces, often in the micro to nano newton range, must be applied in order to prevent parts from being damaged and to prevent them from dislodging in the gripper. This paper presents our work in developing a force controlled microgripper and microgripping strategies using optical beam deflection techniques. The optical beam deflection sensor is based on modified Atomic Force Microscope techniques and is able to resolve forces below a nanonewton. A variety of gripper fingers made from materials with different conductivity and surface roughness are analyzed theoretically and experimentally using the force sensor. These results provide insight into the mechanics of micromanipulation, and the results are used to develop microgripping strategies. A design of a microfabricated force controlled microgripper is presented along with initial experimental results in applying various gripping forces to microparts. The results demonstrate the important role gripping force plays in the grasping and release of microparts.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yu Zhou and Bradley J. Nelson "Force-controlled microgripping", Proc. SPIE 3834, Microrobotics and Microassembly, (18 August 1999); https://doi.org/10.1117/12.357826
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Cited by 10 scholarly publications.
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KEYWORDS
Optical spheres

Adhesives

Surface roughness

Gold

Mechanics

Semiconducting wafers

Sensors

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