High-precision microcutting of ceramics with short-pulsed solid state lasers

Joachim Radtke; Tobias Abeln; Michael Weikert; Friedrich Dausinger

doi:10.1117/12.405713

6 November 2000 High-precision microcutting of ceramics with short-pulsed solid state lasers

Joachim Radtke, Tobias Abeln, Michael Weikert, Friedrich Dausinger

Author Affiliations +

Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405713
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan

Abstract

This contribution will present results for high-precision cutting of technical ceramics with short-pulsed solid-state lasers in fundamental and frequency-doubled wavelength. On the basis of ample experiments, a surprising absorption behavior of some ceramics in the case of irradiation with high intensity will be discussed. Furthermore, the influence of wavelength and process gas on cutting speed and quality is demonstrated. The investigations resulted in a process strategy with multiple passing over of the kerf suited for remarkably improving process velocity and quality. Finally, structures applicable for nozzles and spinnerets are shown.

Citation Download Citation

Joachim Radtke, Tobias Abeln, Michael Weikert, and Friedrich Dausinger "High-precision microcutting of ceramics with short-pulsed solid state lasers", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); https://doi.org/10.1117/12.405713

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE