Heterogeneous 3D integration of multi-spectral photonic sensor with highly oriented micro/nano-pillars of semiconductors

V. J. Logeeswaran; Jacob Goodwin; Aaron M. Katzenmeyer; M. Saif Islam

doi:10.1117/12.821791

11 May 2009 Heterogeneous 3D integration of multi-spectral photonic sensor with highly oriented micro/nano-pillars of semiconductors

V. J. Logeeswaran, Jacob Goodwin, Aaron M. Katzenmeyer, M. Saif Islam

Author Affiliations +

Proceedings Volume 7318, Micro- and Nanotechnology Sensors, Systems, and Applications; 731805 (2009) https://doi.org/10.1117/12.821791
Event: SPIE Defense, Security, and Sensing, 2009, Orlando, Florida, United States

Abstract

We developed a novel method for three-dimensional heterogeneous integration of devices based on any semiconductor material on a pliant surface with arbitrary surface profile. Arrays of optical detectors in the form of vertically oriented micro/nano-pillars with diverse bandgaps and physical properties are fabricated via synthetic bottom-up or transformative top-down approaches on a single crystal surface and then transferred to a different target surface using a polymer assisted shear-fracturing process. The original wafers are used repeatedly for generating more devices and are never consumed. Ohmic contacts with low contact resistance are formed for individual electrical addressing of each layer of sensors using metals and/or conducting polymer such as PAni and PEDOT:PSS. The method offers an opportunity for device fabrication with low fill factor contributing to lower dark current, reduced parasitic capacitance and higher efficiency of light absorption.

Citation Download Citation

V. J. Logeeswaran, Jacob Goodwin, Aaron M. Katzenmeyer, and M. Saif Islam "Heterogeneous 3D integration of multi-spectral photonic sensor with highly oriented micro/nano-pillars of semiconductors", Proc. SPIE 7318, Micro- and Nanotechnology Sensors, Systems, and Applications, 731805 (11 May 2009); https://doi.org/10.1117/12.821791

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available