Approaches to a dies decoupling during failure analysis of the 3D package integrated circuits

G. Molodtsova; R. Milovanov; D. Zubov; E. Kelm

doi:10.1117/12.2181199

18 December 2014 Approaches to a dies decoupling during failure analysis of the 3D package integrated circuits

G. Molodtsova, R. Milovanov, D. Zubov, E. Kelm

Proceedings Volume 9440, International Conference on Micro- and Nano-Electronics 2014; 94400M (2014) https://doi.org/10.1117/12.2181199
Event: The International Conference on Micro- and Nano-Electronics 2014, 2014, Zvenigorod, Russian Federation

Abstract

During failure analysis of integrated circuits (IC), it is often necessary to have opportunity to inspect surface of die. But modern IC processing technology often provide integration of number of overlaping dies in one package (3D package type). In this case upper die complicate access to low die. Thus finding techniques which provide opportunity to inspect surface of each die is actual. In present work the approaches to a die decoupling based on the exposure to fuming nitric acid (FNA) and temperature cycling of IC are considered. The experiments, carried out for 32 GB flash-drive, have shown the possibility of applying mentioned approaches to a die decoupling.

Citation Download Citation

G. Molodtsova, R. Milovanov, D. Zubov, and E. Kelm "Approaches to a dies decoupling during failure analysis of the 3D package integrated circuits", Proc. SPIE 9440, International Conference on Micro- and Nano-Electronics 2014, 94400M (18 December 2014); https://doi.org/10.1117/12.2181199

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available