Mr. Dmitry N. Zubov Profile

Dmitry N. Zubov

at Institute of Nanotechnology of Microelectronics

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Publications (3)

Proceedings Article | 15 March 2019 Paper

Effects of vacuum-plasma etching on the electrical properties of thin ferroelectric PZT films

D. Abdullaev, D. Seregin, D. Zubov, K. Vorotilov

Proceedings Volume 11022, 110221B (2019) https://doi.org/10.1117/12.2520548

KEYWORDS: Reactive ion etching, Ferroelectric materials, Dielectric polarization, Etching, Dielectrics, Annealing, Ion beams, Thin films, Dry etching

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Proceedings Article | 18 December 2014 Paper

Electrochemical recovery of damaged bonding area during failure analysis of the modern integrated circuits

D. Zubov, E. Kelm, R. Milovanov, G. Molodtsova

Proceedings Volume 9440, 94400N (2014) https://doi.org/10.1117/12.2181191

KEYWORDS: Copper, Gold, Silver, Failure analysis, Integrated circuits, Image restoration, Scanning electron microscopy, Aluminum, Optical microscopes, Metals

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Proceedings Article | 18 December 2014 Paper

Approaches to a dies decoupling during failure analysis of the 3D package integrated circuits

G. Molodtsova, R. Milovanov, D. Zubov, E. Kelm

Proceedings Volume 9440, 94400M (2014) https://doi.org/10.1117/12.2181199

KEYWORDS: Fine needle aspiration, Failure analysis, Integrated circuits, Inspection, Scanning electron microscopy, 3D image processing, Nanotechnology, Microelectronics, Semiconductors, Nanoelectronics

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