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Dr. Alexander Huebel
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Publications (1)
Proceedings Article | 11 May 2009 Paper
Calibration strategies for precision stages in state-of-the-art registration metrology
Alexander Huebel, Uwe Schellhorn, Michael Arnz, Gerd Klose, Dirk Beyer
Proceedings Volume 7379, 737914 (2009) https://doi.org/10.1117/12.824281
KEYWORDS: Calibration, Photomasks, Metrology, Error analysis, Image registration, Precision calibration, Data corrections, Standards development, Monte Carlo methods, Lithography
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