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Anatoli Morozov
at Princeton Univ
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Publications (1)
Proceedings Article | 13 November 2024 Poster
Manipulating tin ablation for EUV production
Alec Griffith, Anatoli Morozov, Kirill Lezhnin, Samuel Totorica, Will Fox, Ahmed Diallo
Proceedings Volume PC13215, PC1321516 (2024) https://doi.org/10.1117/12.3037004
KEYWORDS: Extreme ultraviolet, Plasma physics, Plasma, Tin, Pulsed laser operation, Modeling, Physics, Opacity, Mathematical optimization, Lithography
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