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Dr. Azusa N. Hattori
at Osaka Univ
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Publications (1)
Proceedings Article | 8 March 2014 Paper
Functional metal oxide nanostructures fabricated by 3D-nanotemplate PLD
Azusa Hattori, Hidekazu Tanaka
Proceedings Volume 8987, 89871X (2014) https://doi.org/10.1117/12.2044357
KEYWORDS: Zinc oxide, Nanostructures, Nanolithography, 3D metrology, Metals, Oxides, Luminescence, Current controlled current source, Optical lithography, Etching
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