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Bennet Kugler
at Univ. Stuttgart
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Publications (1)
Proceedings Article | 2 October 2024 Presentation + Paper
In situ, non-invasive novel measurement method for the determination of integrated waveguide losses
Michael Hack, Bennet Kugler, Maurice Wanitzek, Ponraj Vijayan, Jörg Schulze, Michael Oehme
Proceedings Volume 13109, 1310908 (2024) https://doi.org/10.1117/12.3028025
KEYWORDS: Signal attenuation, Waveguides, Amorphous silicon, Spectroscopy, Scattered light, Scanning electron microscopy, Cladding, Surface roughness, Interfaces, In situ metrology
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