Speckle interferometry is a method of measuring structure’s tiny deformations which requires accurate phase information of interference fringes. The phase information is acquired by micro-displacement produced by piezoelectric ceramic (PZT). In order to drive the PZT micro-displacement actuator, a multi-functioned and programmable PZT power supply with high precision is designed. Calibration experiment has been done to the PZT micro-actuator in speckle interferometry. Some experiments were also done to test its relevant characteristics. The experiment results show that it has high linearity, repeatability, stability, low ripple and can meet the requirement of the reliability and displacement accuracy in speckle interferometry.
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