Dr. Cho Teh Profile

Dr. Cho Teh

at ASML-HMI

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Publications (2)

Proceedings Article | 22 February 2021 Presentation + Paper

Denoising sample-limited SEM images without clean data

Hairong Lei, Cho Teh, Liangjiang Yu, Gino Fu, Lingling Pu, Wei Fang

Proceedings Volume 11611, 116111A (2021) https://doi.org/10.1117/12.2584653

KEYWORDS: Scanning electron microscopy, Image quality, Image enhancement, Semiconducting wafers, Logic, Semiconductors, Medical imaging, Lithography, Denoising, Aerospace engineering

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Proceedings Article | 20 March 2020 Paper

Automated semiconductor wafer defect classification dealing with imbalanced data

Po-Hsuan Lee, Zhe Wang, Cho Teh, Yi-Sing Hsiao, Wei Fang

Proceedings Volume 11325, 1132526 (2020) https://doi.org/10.1117/12.2552838

KEYWORDS: Machine learning, Scanning electron microscopy, Semiconducting wafers, Inspection, Wafer inspection, Statistical modeling, Image classification, Feature extraction, Performance modeling, Semiconductor manufacturing

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