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Dawei Gao
at Zhejiang Univ
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Publications (2)
SPIE Journal Paper | 22 January 2025
UNeXt-ILT: fast and global context-aware inverse lithography solution
Zebang Lin, Kun Ren, Dawei Gao, Yongyu Wu, Shibin Xu, Zheju Yan
JM3, Vol. 24, Issue 01, 013201, (January 2025) https://doi.org/10.1117/12.10.1117/1.JMM.24.1.013201
KEYWORDS: Lithography, Deep learning, Tunable filters, Source mask optimization, Photovoltaics, Mathematical optimization, Education and training, SRAF, Data modeling, Detection and tracking algorithms
Proceedings Article | 10 December 2024 Paper
Achieving high-accuracy and noise-robust process window analysis through stepwise regression
Fuxun Chen, Zeyang Chen, Chaoyi Zheng, Dong Ni, Dawei Gao, Guodong Zhou
Proceedings Volume 13423, 134230G (2024) https://doi.org/10.1117/12.3052738
KEYWORDS: Data modeling, Lithography, Statistical analysis, Semiconductor manufacturing
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