Dr. Delia Maria Fugger-Schafhauser Profile

Dr. Delia Maria Fugger-Schafhauser

at Silicon Austria Labs GmbH

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Publications (1)

Proceedings Article | 13 June 2023 Paper

Non-destructive Na content analysis in bonded silicon-glass microcavities using laser-induced breakdown spectroscopy

Tibor Bereczki, Yucheng Zhang, Emir Gušo, Delia Fugger, Barbara Oliveira, Ali Roshanghias, Nikolai Andrianov, Norbert Cselyuszka

Proceedings Volume 12532, 125320Y (2023) https://doi.org/10.1117/12.2663913

KEYWORDS: Glasses, Sodium, Silicon, Wafer bonding, Laser induced breakdown spectroscopy, Semiconducting wafers, Laser ablation, Emission spectrum, Pulsed laser operation, Laser bonding

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