Dr. Dingjun Qu Profile

Dr. Dingjun Qu

at Hefei Institutes of Physical Science, CAS

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Publications (2)

Proceedings Article | 15 December 2022 Paper

Spot-scanning laser scattering system for defects detection of wafer surface

Zuoda Zhou, Haiyan Luo, Wei Xiong, Zhiwei Li, Dingjun Qu, Ruizhe Ding, Wei Jin, Jin Hong

Proceedings Volume 12478, 124782D (2022) https://doi.org/10.1117/12.2654738

KEYWORDS: Semiconducting wafers, Light scattering, Scattering, Defect detection, Laser scattering, Electromagnetic scattering, Particles, Laser systems engineering

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Proceedings Article | 15 December 2022 Paper

Detection of reagent residue on unpolished wafer surface using spot scanning surface inspection system

Dingjun Qu, Zhiwei Li, Zuoda Zhou, Ruizhe Ding, Wei Jin, Haiyan Luo, Wei Xiong

Proceedings Volume 12478, 124782F (2022) https://doi.org/10.1117/12.2654751

KEYWORDS: Signal to noise ratio, Semiconducting wafers, Image segmentation, Signal detection, Inspection, Defect inspection, Signal processing, Image processing, Defect detection

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