Dr. Dzung Viet Dao Profile

Dr. Dzung Viet Dao

at Ritsumeikan Univ

SPIE Involvement:

Author

Publications (3)

SPIE Journal Paper | 1 October 2009

Development of polymer electrostatic comb-drive actuator using hot embossing and ultraprecision cutting technology

Satoshi Amaya, Dzung Dao, Susumu Sugiyama

JM3, Vol. 8, Issue 04, 043065, (October 2009) https://doi.org/10.1117/12.10.1117/1.3268366

KEYWORDS: Polymethylmethacrylate, Silicon, Actuators, Microactuators, Polymers, Polymeric actuators, Gold, Electrodes, Laser cutting, Scanning electron microscopy

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Proceedings Article | 9 January 2008 Paper

Design and fabrication process of a micropump using bulk Pb(Zr,Ti)O3 for microfluidic devices

Ryohei Sakamoto, Van Thanh Dau, Dzung Viet Dao, Katsuhiko Tanaka, Susumu Sugiyama

Proceedings Volume 6800, 680022 (2008) https://doi.org/10.1117/12.759548

KEYWORDS: Ferroelectric materials, Silicon, Actuators, Microfluidics, Gold, Aluminum, Etching, Photomasks, Semiconducting wafers, Device simulation

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Proceedings Article | 29 December 2005 Paper

Development of micro motion sensors based on piezoresistive and thermo-resistive effects in silicon

Dzung Dao, Van Dau, Tatsuo Shiozawa, Hideo Kumagai, Susumu Sugiyama

Proceedings Volume 6037, 60370K (2005) https://doi.org/10.1117/12.638380

KEYWORDS: Gyroscopes, Sensors, Silicon, Resistance, Signal processing, Microelectromechanical systems, Calibration, Temperature metrology, Virtual colonoscopy, Structural sensing

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