Eiji Shiozaki
at ULVAC Coating Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 26 September 2019 Presentation + Paper
Proceedings Volume 11148, 1114817 (2019) https://doi.org/10.1117/12.2536624
KEYWORDS: Chromium, Reflection, Reflectivity, Refractive index, Etching, Phase shifts, Flat panel displays

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