Dr. Emmanuel Saucedo-Flores
at Univ de Guadalajara
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 29 July 2004 Paper
Emmanuel Saucedo-Flores, Ruben Ruelas, Alejandro Contreras-Nuno, Jose Mireles
Proceedings Volume 5389, (2004) https://doi.org/10.1117/12.545329
KEYWORDS: Etching, Actuators, Microelectromechanical systems, Optical lithography, Micromachining, Oxides, Photoresist materials, Standards development, Low pressure chemical vapor deposition, Silicon

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