Mr. Gavin McCoy Profile

Gavin McCoy

at Univ of Illinois

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 14 April 2023 Poster

Gordon Jameson Crouse, Gavin McCoy, Nathan Bartlett, Andrew Herschberg

Proceedings Volume PC12494, PC124940O (2023) https://doi.org/10.1117/12.2663094

KEYWORDS: Tin, Hydrogen, Diffusion, Extreme ultraviolet, Temperature metrology, Prototyping, Extreme ultraviolet lithography

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Keywords/Phrases