Gil-Woo Song
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 27 April 2023 Poster + Paper
Proceedings Volume 12496, 124963N (2023) https://doi.org/10.1117/12.2670089
KEYWORDS: Deformation, Semiconducting wafers, Overlay metrology, Control systems, Optical alignment, Lithography, Machine learning

Proceedings Article | 26 May 2022 Poster + Paper
Proceedings Volume 12053, 120531O (2022) https://doi.org/10.1117/12.2612771
KEYWORDS: Semiconducting wafers, Overlay metrology, Optical parametric oscillators, Scanners, Metrology, Machine learning, Neural networks, Error analysis, Semiconductors, Process control

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