A fiber optic sensor for measuring the diameter and from errors of very small hole or blind hoe. with diameter down to 0.2 mm and depth to diameter ratio up to 20 was developed. Since optical non-contact methods are difficult to use for measuring the diameter and from errors of small hole at any cross section, a fiber optic sensor, which combines the advantages of optical non-contact method and mechanical contact one, was proposed. The principle is based on the evaluation of a central position of stylus ball by an optical system. Experiments show that the accuracy of the system is better than 1 micrometers and the measuring force is less than 10 (mu) N.
An opto-mechanical microprobe system which combines the advantages of optical non-contact method and mechanical contact one is proposed for measuring very small parts on coordinate measuring machines. The principle is based on the evaluation of a central position of stylus ball by an optical system, the stylus ball is illuminated by a cold light source through an optical fiber. The most inventive advantage of the microprobe is that the deformation of its stylus does not influence the measuring results, so the stylus could be extremely thin. Until now an opto-mechanical microprobe with stylus ball of diameter of about 40 micrometers and stylus of diameter of about 20 micrometers is developed. Experiments show that the accuracy of the opto-mechanical microprobe is better than 1 micrometers and the measuring force is less than 10 (mu) N.
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