CONFERENCE PROCEEDINGS
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Heita Kimizuka
at Hitachi High-Tech Korea Co Ltd
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Publications (3)
Proceedings Article | 10 April 2024 Poster
Electrical characterization and inspection of contact plugs using laser-assisted SEM
Minami Shoji, Yohei Nakamura, Yasuhiro Shirasaki, Heita Kimizuka, Kazufumi Yachi, Satoshi Takada, Natsuki Tsuno
Proceedings Volume 12955, 129553G (2024) https://doi.org/10.1117/12.3011058
KEYWORDS: Inspection, Scanning electron microscopy, Metrology, Laser irradiation, Electrical properties, Defect detection, Yield improvement, Semiconductors, Modulation, Manufacturing
Proceedings Article | 27 April 2023 Poster + Paper
Laser assisted SEM for visualizing electrical property using voltage contrast dynamics
Minami Shoji, Yohei Nakamura, Yasuhiro Shirasaki, Shota Mitsugi, Heita Kimizuka, Satoshi Takada, Yuko Iwabuchi, Natsuki Tsuno
Proceedings Volume 12496, 1249630 (2023) https://doi.org/10.1117/12.2658182
KEYWORDS: Scanning electron microscopy, Resistance, Laser irradiation, Electrical properties, Modulation, Manufacturing, Inspection, Metals, Laser development, Electron beams
Proceedings Article | 27 April 2023 Presentation + Paper
Laser-assisted SEM for high-spatial resolution material metrology and inspection
Yasuhiro Shirasaki, Minami Shoji, Yohei Nakamura, Shota Mitsugi, Heita Kimizuka, Satoshi Takada, Yuko Iwabuchi, Natsuki Tsuno
Proceedings Volume 12496, 124961T (2023) https://doi.org/10.1117/12.2658184
KEYWORDS: Scanning electron microscopy, Laser irradiation, Electron beams, Materials properties, Semiconductors, Metrology, Inspection
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