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Hiroaki Suzuki
at Panasonic Connect Co., Ltd.
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 17 March 2023 Presentation + Paper
Crystallization of a-Si films deposited by RF sputtering using blue direct diode laser
Proceedings Volume 12409, 1240912 (2023) https://doi.org/10.1117/12.2651151
KEYWORDS: Blue lasers, Amorphous silicon, Annealing, Crystals, Crystallization, Laser irradiation, Laser processing, Excimer lasers, Semiconductor lasers, Light sources
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