Optical tunable filters play a key role in silicon photonic integrated circuits. Highly energy-efficient tunability and a wide continuous tuning range are strongly desired for silicon photonics filters. All-optically thermo-optic (TO) tunable devices based on the light absorbers integrated close to the silicon structure as localized heaters have attracted increasing attention because optical heaters, compared with electrical ones, can greatly reduce thermal loads and heat leakage for the device. They provide a new approach to implementing high-efficiency TO tuning with a fast response. In this work, we propose and experimentally demonstrate an on-chip all-optically tunable filter based on a suspended silicon microdisk resonator with an ultra-compact optical heater, which is a platinum absorber deposited directly on the top of the ridge waveguide. Attributed to the novel optical pumping scheme, ultra-small device size, and suspended waveguide structure, an ultra-high tuning efficiency of 37.70 nm/mW is achieved. Only 1.405 mW pump power is required to tune the single-resonance filter over a wide spectral range of ∼54.5 nm. The demonstrated tunable optical filter has the advantages of high tuning efficiency, compact footprint, and simple fabrication processes, which has significant applications for on-chip all-optical systems.
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