Ines A. Stolberg
Manager Marketing & Sales at Vistec Electron Beam GmbH
SPIE Involvement:
Conference Program Committee | Conference Chair | Author
Websites:
Publications (14)

SPIE Journal Paper | 31 January 2025 Open Access
Kevin Edelmann, Stefan Fasold, Markus Greul, Eike Linn, Ines Stolberg, Ulf Weidenmüller
JM3, Vol. 24, Issue 01, 013202, (January 2025) https://doi.org/10.1117/12.10.1117/1.JMM.24.1.013202
KEYWORDS: Waveguides, Semiconducting wafers, Wafer level optics, Silicon, Electron beam lithography, Lithography, Integrated optics, Switching, Integrated photonics, Vestigial sideband modulation

Proceedings Article | 12 November 2024 Presentation + Paper
U. Weidenmüller, S. Fasold, E. Linn, I. Stolberg
Proceedings Volume 13216, 132160J (2024) https://doi.org/10.1117/12.3034686
KEYWORDS: Optics manufacturing, Electron beam lithography, Line edge roughness, Optical gratings, Semiconductor manufacturing, Lithography, Waveguides, Vestigial sideband modulation, Photomasks, Optical transmission

Proceedings Article | 18 June 2024 Poster + Paper
U. Weidenmüller, S. Fasold, E. Linn, I. Stolberg
Proceedings Volume 13012, 130120Q (2024) https://doi.org/10.1117/12.3017567
KEYWORDS: Electron beam lithography, Optics manufacturing, Line edge roughness, Waveguides, Semiconductor manufacturing, Axicons, Photomasks, Lithography, Semiconducting wafers

Proceedings Article | 9 April 2024 Poster + Paper
M. Greul, K. Edelmann, S. Fasold, J. Hartbaum, E. Linn, I. Stolberg, U. Weidenmueller
Proceedings Volume 12956, 129560N (2024) https://doi.org/10.1117/12.3010355
KEYWORDS: Waveguides, Electron beam lithography, Design, Integrated photonics, Fabrication, Silicon photonics, Photonics systems

Proceedings Article | 21 November 2023 Presentation + Paper
Ines Stolberg, Eike Linn, Ulf Weidenmueller, Matthias Slodowski
Proceedings Volume 12751, 127510K (2023) https://doi.org/10.1117/12.2688360
KEYWORDS: Electron beam lithography, Vestigial sideband modulation, Photonics, Lithography, Industrial applications, Reproducibility, Optics manufacturing, Optical gratings, Manufacturing, Geometrical optics

Showing 5 of 14 publications
Conference Committee Involvement (20)
40th European Mask and Lithography Conference (EMLC 2025)
16 June 2025 | Dresden, Germany
Novel Patterning Technologies 2025
24 February 2025 | San Jose, California, United States
Novel Patterning Technologies 2024
26 February 2024 | San Jose, California, United States
38th European Mask and Lithography Conference
19 June 2023 | Dresden, Germany
Novel Patterning Technologies 2023
27 February 2023 | San Jose, California, United States
Showing 5 of 20 Conference Committees
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