CONFERENCE PROCEEDINGS
Advanced Search
Jianchao Chen
at Harbin Institute of Technology
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 11 October 2010 Paper
Comparison of optical surface roughness measured by stylus profiler, AFM, and white light interferometer using power spectral density
Jianchao Chen, Tao Sun, Jinghe Wang
Proceedings Volume 7656, 76562D (2010) https://doi.org/10.1117/12.863268
KEYWORDS: Atomic force microscopy, Spatial frequencies, Surface roughness, Silicon, Semiconducting wafers, Interferometers, Optical testing, Atomic force microscope, Zerodur, Mirrors
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top